Tabletop interferometry

Tabletop interferometry

TOOLS & TECHNIQUES UPDATE As and P cracker The QC-500 Cracker from Oxford Applied Research enables the generation of atomic species from solid P or A...

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TOOLS & TECHNIQUES UPDATE

As and P cracker The QC-500 Cracker from Oxford Applied Research enables the generation of atomic species from solid P or As. It has applications in As and P cracking, doping, bulk growth, oxide and nitride growth, and improving sticking efficiencies. The source has a sublimator zone as well as a red-to-white P conversion buffer zone to avoid pressure bursts seen in conventional two-zone cracker systems. The sublimated material passes through an allquartz valve into the RF excited cracker zone. The RF plasma acts to dissociate the material into atomic form, allowing higher growth rates and dopant incorporation to be achieved. The cracking zone can also be used to generate atomic N, O, and H. The QC-500 is ultra high vacuum compatible, has an NW63CF mounting, and comes with a RF power supply, manual matching unit, and valve/actuator. Contact: www.oaresearch.com

Remote operation add-in A new add-in for analySIS image analysis software from Soft Imaging System allows the online, remote operation of microscopes, cameras, and motor stages. The telePresence add-in also gives direct access to image processing functions, so they are available anywhere. The software allows the discussion of live images between distant workers, reducing waiting in a cleanroom or exposure to hazards if working with toxic substances. An electronic address book manages the accessible workstations. The data and function calls between client and server computers are done automatically. Dialog boxes operate the most important functions for either light or electron microscopes. In the discussion mode, displayed images are synchronized on both computers and measurements can be made directly within an image. All images and documents can be transmitted without the size restrictions of email, although images can also be compressed to optimize performance speed. telePresence is optimized for FireWire digital cameras from Soft Imaging System. Contact: www.soft-imaging.net

QD product launch NanoCo is launching its first ‘off the shelf’ quantum dot (QD) products. Designated Nanodot1 and Nanodot2, the CdSe QD samples, made by a proprietary process, are coated and passivated with hexyldecylamine. They are available for purchase or trial. Current production runs have photoluminescence maximum half-widths of 34 nm for Nanodot1 and 38 nm for Nanodot2. NanoCo says its products and specifications are under continuous review and development and expects to improve particle size distributions. The company plans to release a range of CdSe/CdS or ZnS core shell structures soon. It can also negotiate customized synthesis of sulfides or selenides of most metals, but notably Cd, Ga, In, or Zn; core shell structures combining more than one binary material; phosphides or arsenides of most metals; and oxides and other materials. Contact: www.nanoco.biz

Versatile SPM The JSPM-5200 from JEOL is a versatile scanning probe microscope (SPM) that combines atomic force microscopy (AFM) and scanning tunneling microscopy (STM) with increased control over the imaging environment. It allows the examination of cooled or heated samples in fluid, controlled or ambient air, and vacuum. The microscope offers more than 20 types of measurement mode for analysis of sample surfaces. This includes contact, noncontact, and tapping AFM; STM; nanoindentation; scanning Kelvin probe microscopy; and magnetic force microscopy. During scanning, four different signals can be

collected and displayed simultaneously. A wide variety of measurements can be made by combining signals. An optional extended lock-in amplifier can extract frequencydependent datasets and relay them back to the instrument for image display. Samples can be heated to 500°C or cooled to 130 K using hot and cold stages. Open and hermetically sealed in-fluid observation cells are available. Observation of samples under vacuum is done in a glass bell jar, achieving a vacuum of 7 × 10-7 torr. Operating parameters are displayed on the graphical user interface and a login function loads parameters personal to each user. Contact: www.jeol.com

Tabletop interferometry Instant wide-area, three-dimensional images and nondestructive measurements can be made with the 3DScope2000™, a new tabletop instrument from Nano-Or Technologies Ltd. The instrument is portable, immune to vibration, and easy to use. 3DScope2000 has applications in the inspection of wafer surface, photoresist, and etch and lift-off in Si and compound semiconductor devices; z-axis mapping and movement imaging of microelectromechanical systems; inspection and assembly of photonics components; and defect characterization in flat panel displays. The 3DScope2000 uses optical technology that combines an interferometer and a white light microscope to give the nanometer vertical resolution possible with interferometry technology and micron level horizontal resolution. The absence of moving parts gives a high level of repeatability and reliability. It uses laser illumination and a high resolution CCD camera for image capture. Unlike standard interferometry, a reference beam is not used, which means that vibrations or dust do not change the optical path and degrade the measurement accuracy. A surface topographic map is generated by proprietary algorithms. The system is operated by PC and includes an optical sensing unit and electronics control box. Contact: www.nano-or.com

March 2003

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